Outlines:

  • Show how airflow and particle management can be
    considered early in the design process or later in
    cleanroom expansion and retrofitting.

  • Provide a general approach to understanding
    concepts for air handling (plenum, exhaust, perforated
    floor, etc.) to provide unidirectional and uniform airflow
    in a cleanroom or mini or micro environment.

  • Provide an overview of the modern available modeling
    techniques for Airflow and particulate and molecular
    contamination management.

  • Provide actual examples where computer modeling of
    airflow was used to design or modify air handling in
    mini environment configurations, wet stations, and
    cleanroom and. The advantages of the design
    changes and modifications in the airflow and
    contaminant particle transport and deposition will be
    shown.

  • Provide an understanding of particle transport and
    deposition in CVD, PVD systems and the effect of
    temperature, pressure, gas flow, geometry and other
    parameters on particle deposition

* For on-site presentation, please contact us
Control of particulate and
chemical contamination  in
clean environments
Home   I   Consulting service   I    Shortcourses   I   Instruments
____________________________________________________________________________________
© 2010 Provectus Technologies, LLC. All rights reserved                                                                     Terms of use   I  Privacy